Patent №
US 7,299,154
Granted
2007-11-20
Filed 2005
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
2
ml · planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11130459
The present invention provides a method and apparatus for detecting step and impulse disturbances. The method includes determining a pattern based on a plurality of probabilities associated with a corresponding plurality of wafer processing parameters and determining a type of a disturbance based upon the pattern.
AI classification
Planning0.97
Machine learning0.54
AI hardware0.34
Knowledge representation0.01
Vision0.01
Evolutionary computation0.01
Natural language0.00
Speech0.00
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 165650900
Assignors
HE, QINGHUA, WANG, JIN, BODE, CHRISTOPHER A.
On an employer assignment, the assignors are typically the inventors.
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