Patent №
US 7,375,330
Granted
2008-05-20
Filed 2006
Owner
HITACHI HIGH-TECHNOLOGIES CORPORATION
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11396654
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodica structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.
AI classification
Ownership
HITACHI HIGH-TECHNOLOGIES CORPORATION
assignment · 177620424
Assignors
INADA, HIROMI, TANAKA, HIROYUKI, WATANABE, SHUN-ICHI, ISAKOZAWA, SHIGETO, SATO, MITSUGU, TAKANE, ATSUSHI, YAMAGUCHI, SATOSHI
On an employer assignment, the assignors are typically the inventors.