SYSTEM FOR REVIEWING DEFECTS, A COMPUTER IMPLEMENTED METHOD FOR REVIEWING DEFECTS, AND A METHOD FOR FABRICATING ELECTRONIC DEVICES

A system for reviewing defects includes an analysis module configured to analyze defect information of a plurality of intermediate products, the defect information including information of an amount of defects classified by sizes of the defects existing in each of the intermediate products; a failure magnitude calculation module configured to calculate a systematic failure magnitude of the intermediate products caused by fabrication procedure of the intermediate products; a classification module configured to classify a calculated result of the systematic failure magnitude; and a review target selection module configured to select intermediate products becoming review targets.