Patent №
US 7,415,868
Granted
2008-08-26
Filed 2006
Owner
MULTIPROBE, INC.
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11385102
The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orientations to scan a feature, such as a semiconductor line or trench, and to display the scan data such that tip artifacts from each tip can be omitted from the measurement by data from the other tips.
AI classification
Ownership
MULTIPROBE, INC.
assignment · 176700035
Assignors
HARE, CASEY PATRICK, ERICKSON, ANDREW NORMAN, HARE, CASEY PATRICK, ERICKSON, ANDREW NORMAN
On an employer assignment, the assignors are typically the inventors.