SCANNING ELECTRON MICROSCOPE AND CD MEASUREMENT CALIBRATION STANDARD SPECIMEN

Patent №

US 7,420,168

Granted

2008-09-02

Filed 2007

Owner

Lab

AI components

1

vision

Assignment

None on record

Dataset

AIPD

2023_r1 edition

Application

11902559

A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.

VisionH01L 22/34H10P 74/277H01L 2924/0002

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