Patent №
US 7,499,583
Granted
2009-03-03
Filed 2004
Owner
APPLIED MATERIALS ISRAEL LTD.
+2 more
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10852996
A method and apparatus for inspecting the surface of articles, such as chips and wafers, for defects, includes a first phase of optically examining the complete surface of the article inspected at a relatively high speed and with a relatively low spatial resolution, and a second phase of optically examining with a relatively high spatial resolution only the suspected locations for the presence or absence of a defect therein.
AI classification
Ownership
APPLIED MATERIALS ISRAEL LTD.
namechg · 169710898
ORBOT INSTRUMENTS, LTD.
assignment · 169720143
OPAL TECHNOLOGIES, LTD.
merger · 169720395
Assignors
ALUMOT, DAVID, NEUMANN, GAD, SHERMAN, RIVKA, TIROSH, EHUD, ALUMOT, DAVID, NEUMANN, GAD, SHERMAN, RIVKA, TIROSH, EHUD
On an employer assignment, the assignors are typically the inventors.