Patent №
US 7,558,641
Granted
2009-07-07
Filed 2007
Owner
LAM RESEARCH CORPORATION
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11693708
A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.
AI classification
Ownership
LAM RESEARCH CORPORATION
assignment · 191370094
Assignors
HUANG, CHUNG-HO, HEFTY, ROBERT, LUI, ANDREW, HUMBIRD, DAVE, POTTER, CHARLES
On an employer assignment, the assignors are typically the inventors.