RECIPE REPORT CARD FRAMEWORK AND METHODS THEREOF

Patent №

US 7,558,641

Granted

2009-07-07

Filed 2007

Owner

LAM RESEARCH CORPORATION

Lab

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

11693708

A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.

PlanningG05B 19/41875H10P 72/0612G05B 2219/31443G05B 2219/32007G05B 2219/32097G05B 2219/45031Y02P 90/02Y10S 715/961

AI classification

Planning0.98
AI hardware0.01
Evolutionary computation0.01
Knowledge representation0.01
Machine learning0.00
Natural language0.00
Speech0.00
Vision0.00

Ownership

LAM RESEARCH CORPORATION

assignment · 191370094

Assignors

HUANG, CHUNG-HO, HEFTY, ROBERT, LUI, ANDREW, HUMBIRD, DAVE, POTTER, CHARLES

On an employer assignment, the assignors are typically the inventors.

From the same owner

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