Patent №
US 7,715,941
Granted
2010-05-11
Filed 2004
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10980407
The present invention provides a method and apparatus for scheduling a plurality of processing tools. The method comprises providing a first processing tool and a plurality of second processing tools, selecting one of the plurality of second processing tools, and determining a target output parameter of a combination of processing tools comprising said first processing tool and said selected one of the plurality of second processing tools. The method also includes determining at least one input parameter of a process model for controlling the first processing tool based upon the target output parameter of the combination of processing tools.
AI classification
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 159520679
Assignors
PURDY, MATTHEW A.
On an employer assignment, the assignors are typically the inventors.