Patent №
US 7,764,367
Granted
2010-07-27
Filed 2007
Owner
HITACHI HIGH-TECHNOLOGIES CORPORATION
Lab
—
AI components
2
vision · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11834217
A surface inspection method and a surface inspection apparatus in which a plurality of photodetectors are arranged in a plurality of directions so that light scattered, diffracted or reflected on a surface of an object to be inspected or in the vicinity of the surface is detected and a plurality of signals obtained by this are subjected to weighted addition processing or weighted averaging processing by linear combination.
AI classification
Ownership
HITACHI HIGH-TECHNOLOGIES CORPORATION
assignment · 209220052
Assignors
MATSUI, SHIGERU
On an employer assignment, the assignors are typically the inventors.