METHOD AND APPARATUS FOR DETECTING DEFECTS IN WAFERS

Patent №

US 7,813,541

Granted

2010-10-12

Filed 2005

Owner

NEGEVTECH LTD.

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

11069712

A method for inspecting a wafer including a multiplicity of dies, the method including dividing an image of at least a portion of the wafer into a plurality of sub-images each representing a sub-portion of the wafer and selecting at least one defect candidate within each sub-image by comparing each sub-image to a corresponding sub-image of a reference including a representation, which is assumed to be faultless, of the portion of the wafer.

VisionG01N 21/95607G01N 21/9501G06T 7/001

AI classification

Vision1.00
AI hardware0.06
Natural language0.00
Machine learning0.00
Knowledge representation0.00
Evolutionary computation0.00
Planning0.00
Speech0.00

Ownership

NEGEVTECH LTD.

assignment · 163480089

Assignors

SALI, EREZ, WAGNER, MARK, DORPHAN, YUVAL, YANIR, TOMER, DOTAN, NOAM, ZASLAVSKY, RAN

On an employer assignment, the assignors are typically the inventors.

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