SYSTEMATIC BENCHMARKING SYSTEM AND METHOD FOR STANDARDIZED DATA CREATION, ANALYSIS AND COMPARISON OF SEMICONDUCTOR TECHNOLOGY NODE CHARACTERISTICS

One aspect provides a method of standardized data creation and analysis of semiconductor technology node characteristics. In one embodiment, the method includes: (1) designing at least one representative benchmark circuit, (2) establishing standard sensitization and measurement rules for delay and power for the at least one representative benchmark circuit and across corners in the technology nodes, (3) performing a simulation by sweeping through a range of values and at predetermined intervals across the corners, (4) extracting data from the simulation and (5) parsing and interpreting the data to produce at least one report.