SUBSTRATE PROCESSING RECIPE MANAGER

Patent №

US 8,082,045

Granted

2011-12-20

Filed 2007

Owner

INTERMOLECULAR, INC.

Lab

AI components

1

hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

11771836

A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.

AI hardwareG05B 19/41865G05B 2219/32008G05B 2219/32096G05B 2219/32097G05B 2219/32098G05B 2219/32128G05B 2219/32244G05B 2219/45031+1 more

AI classification

AI hardware1.00
Evolutionary computation0.33
Knowledge representation0.07
Vision0.04
Machine learning0.01
Speech0.00
Natural language0.00
Planning0.00

Ownership

INTERMOLECULAR, INC.

assignment · 262700656

Assignors

ASHIZAWA, YOSHIKI, PAI, HENG-CHENG, NGATCHOU, PATRICK, WEINER, KURT, SCHMIDT, JOHN

On an employer assignment, the assignors are typically the inventors.

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