ULTRAFINE PATTERN DISCRIMINATION USING TRANSMITTED/REFLECTED WORKPIECE IMAGES FOR USE IN LITHOGRAPHY INSPECTION SYSTEM

A technique for discriminating a specific pattern, such as an assist pattern, from an integrate circuit pattern of a workpiece by using transmission and reflection images of the workpiece pattern is disclosed. A pattern discrimination device includes an optical image acquisition unit for acquiring a transmissive image of a workpiece having a pattern and a reflective image of the workpiece pattern simultaneously, and a specific pattern detection unit which detects for extraction a specific pattern from among pattern shapes of the transmissive and reflective images in conformity with a distinguishing condition of the specific pattern. A workpiece pattern inspection apparatus using the device is also disclosed.