Patent №
US 8,103,087
Granted
2012-01-24
Filed 2007
Owner
HITACHI HIGH-TECHNOLOGIES CORPORATION
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11655226
A fault inspection method and apparatus in which the scattergram is separated or objects of comparison are combined in such a manner as to reduce the difference between an inspection object image and a reference image. As a result, the difference between images caused by the thickness difference in the wafer can be tolerated and the false information generation prevented without adversely affecting the sensitivity.
AI classification
Ownership
HITACHI HIGH-TECHNOLOGIES CORPORATION
assignment · 191420316
Assignors
MAEDA, SHUNJI, SAKAI, KAORU
On an employer assignment, the assignors are typically the inventors.