MODELING THIN-FILM STACK TOPOGRAPHY EFFECT ON A PHOTOLITHOGRAPHY PROCESS

One embodiment of the present invention provides a system that determines image intensity at a location in a photoresist (PR) layer on a wafer. During operation, the system receives a set of masks which were used to generate one or more patterned layers of a multilayer structure on the wafer, wherein a patterned layer includes a set of reflectors on a top surface of the patterned layer, which correspond to patterns in a patterned-layer mask in the set of masks, wherein a reflector reflects light from a light source during a photolithography process. The system then generates a first virtual mask based on the first mask and the patterned-layer mask, wherein the first virtual mask uses a clear area to model a reflector in the set of reflectors. Next, the system determines the image intensity value at the location on the PR layer based at least on the first mask and the first virtual mask.