Patent №
US 8,560,107
Granted
2013-10-15
Filed 2007
Owner
HITACHI KOKUSAI ELECTRONIC INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11892367
There are provided at least one or more of substrate processing apparatuses that process a substrate, and a group management device connected to each substrate processing apparatus, so that the group management device monitors an operation state of the substrate processing apparatus, thereby grasping a timing of updating a program of the substrate processing apparatus, and when the timing arrives, updates the program.
AI classification
Ownership
HITACHI KOKUSAI ELECTRONIC INC.
assignment · 201000404
Assignors
UEDA, OSAMU, IWAKURA, HIROYUKI
On an employer assignment, the assignors are typically the inventors.