Patent №
US 8,907,277
Granted
2014-12-09
Filed 2010
Owner
CARL ZEISS SMT INC.
+2 more
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
12919676
Methods disclosed herein include: (a) forming a channel in a sample, the channel extending one micron or more along a direction oriented at an angle to a surface of the sample; (b) exposing a portion of the sample above the channel to a particle beam to cause particles to leave the surface of the sample; and (c) forming an image of the sample based on particles that leave the surface.
AI classification
AI hardware0.54
Vision0.43
Natural language0.00
Knowledge representation0.00
Machine learning0.00
Evolutionary computation0.00
Speech0.00
Planning0.00
Ownership
CARL ZEISS SMT INC.
assignment · 251730185
CARL ZEISS NTS, LLC
correct · 251950186
CARL ZEISS MICROSCOPY, LLC
merger · 301340793
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