Laser Crystal Degradation Compensation

Patent №

US 8,976,343

Granted

2015-03-10

Filed 2013

Owner

KLA-TENCOR CORPORATION

Lab

AI components

2

kr · evo

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

13905346

Method and system for laser crystal degradation compensation are disclosed. The method includes: defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration.

AI classification

Evolutionary computation0.97
Knowledge representation0.66
Natural language0.00
Speech0.00
Machine learning0.00
AI hardware0.00
Planning0.00
Vision0.00

Ownership

KLA-TENCOR CORPORATION

assignment · 305110830

Assignors

GENIS, PATRICK C.

On an employer assignment, the assignors are typically the inventors.

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