MEMS ACTUATOR WITH DISCRETELY CONTROLLED MULTIPLE MOTIONS

Patent №

US 9,505,606

Granted

2016-11-29

Filed 2007

Owner

STEREO DISPLAY, INC.

+2 more

Lab

AI components

1

hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

11762683

A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

AI hardwareB81B 3/0062B81B 2201/037B81B 2201/045

AI classification

AI hardware0.58
Natural language0.00
Machine learning0.00
Planning0.00
Speech0.00
Evolutionary computation0.00
Knowledge representation0.00
Vision0.00

Ownership

STEREO DISPLAY, INC.

assignment · 194250077

ANGSTROM, INC.

assignment · 194250077

INC., STEREO D, INC.

assignment · 546800198

Assignors

SOHN, JIN YOUNG, CHO, GYOUNG IL, SEO, CHEONG SOO

On an employer assignment, the assignors are typically the inventors.

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