LENTICULAR WAFER INSPECTION

Patent №

US 9,523,645

Granted

2016-12-20

Filed 2014

Owner

EXNODES INC.

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

14519054

A system and method for inspecting a surface, comprising: illuminating said surface with an electromagnetic radiation to generate scattered radiation from features of said surface; inducing a change in phase to said scattered radiation for reducing divergence of said scattered radiation and for redirecting said scattered radiation towards a predetermined spatial region; focusing after said radiation has propagated to said spatial region; capturing an image of radiation, whereby said features of said surface are detected in said image of radiation.

VisionG01N 21/8806G01B 11/26G01N 21/9501G03F 9/7088G01N 2021/8822G01N 2201/06113G01N 2201/12

AI classification

Vision1.00
Natural language0.00
Evolutionary computation0.00
Machine learning0.00
Speech0.00
AI hardware0.00
Planning0.00
Knowledge representation0.00

Ownership

EXNODES INC.

assignment · 402330156

Assignors

PAVANI, SRI RAMA PRASANNA

On an employer assignment, the assignors are typically the inventors.

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