THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS AND CONTROL METHOD THEREOF

To measure the three-dimensional shape of a target object with higher accuracy, a three-dimensional shape measurement apparatus projects a pattern image to a predetermined measurement area including a support structure on which the target object is placed; and captures an image of the predetermined measurement area. In addition, the apparatus derives, based on the captured image, a first correction value for correcting a position fluctuation of a support structure, and a second correction value for correcting a fluctuation of a projection position; and calculates, based on the captured image and the first correction value and the second correction value, a plurality of coordinates on a surface of the target object.