RADIATION INSPECTING APPARATUS

Patent №

US 9,606,072

Granted

2017-03-28

Filed 2015

Owner

SHIMADZU CORPORATION

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

14735112

In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.

VisionG01N 23/046G01T 7/08

AI classification

Vision0.99
Evolutionary computation0.00
Knowledge representation0.00
Natural language0.00
Speech0.00
Machine learning0.00
AI hardware0.00
Planning0.00

Ownership

SHIMADZU CORPORATION

assignment · 358120257

Assignors

TAGAWA, YUSUKE, OOHARA, HIROSHI, UENO, YOSHIHIRO

On an employer assignment, the assignors are typically the inventors.

From the same owner

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