Patent №
US 9,606,072
Granted
2017-03-28
Filed 2015
Owner
SHIMADZU CORPORATION
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
14735112
In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.
AI classification
Ownership
SHIMADZU CORPORATION
assignment · 358120257
Assignors
TAGAWA, YUSUKE, OOHARA, HIROSHI, UENO, YOSHIHIRO
On an employer assignment, the assignors are typically the inventors.