Patent №
US 9,841,370
Granted
2017-12-12
Filed 2015
Owner
KLA-TENCOR CORPORATION
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
14620992
Multi-layered targets, design files and design and production methods thereof are provided. The multi-layered targets comprise process layers arranged to have parallel segmentation features at specified regions, and target layer comprising target elements which are perpendicular to the parallel segmentation features of the process layers at the specified regions.
AI classification
Vision0.67
Natural language0.00
Knowledge representation0.00
Evolutionary computation0.00
Machine learning0.00
Speech0.00
AI hardware0.00
Planning0.00
Ownership
KLA-TENCOR CORPORATION
assignment · 350200128
Assignors
AMIR, NURIEL
On an employer assignment, the assignors are typically the inventors.
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