Patent №
US 11,630,937
Granted
2023-04-18
Filed 2021
Owner
COVENTOR, INC.
Lab
—
AI components
2
planning · hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
17355533
A virtual fabrication environment for semiconductor device structures that includes the use of virtual metrology measurement data to optimize a virtual fabrication sequence is described. Further, calibration of the virtual fabrication environment is performed by comparing virtual metrology measurement data from a virtual fabrication run with a subset of measurements performed in a physical fabrication environment. Additionally, virtual experiments conducted in the virtual fabrication environment of the present invention generate multiple device structure models using ranges of process and design parameter variations for an integrated process flow and design space of interest.
AI classification
Ownership
COVENTOR, INC.
assignment · 566370831
Assignors
GREINER, KENNETH B., BREIT, STEPHAN R., FRIED, DAVID M., FAKEN, DANIEL
On an employer assignment, the assignors are typically the inventors.