Patent №
US 11,680,839
Granted
2023-06-20
Filed 2020
Owner
ASM IP HOLDING B.V.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
16944763
A chemical vessel used for holding a liquid chemical precursor is disclosed comprising a liquid level sensor tube. The liquid level sensor tube is configured to operate in an environment where the liquid chemical precursor is heated to a point of boiling or vaporization. The liquid level sensor tube comprises housing with a slot built in to prevent any false readings of sensors disposed within the liquid level sensor tube.
AI classification
Planning0.55
Natural language0.01
Knowledge representation0.01
Machine learning0.00
Evolutionary computation0.00
Speech0.00
AI hardware0.00
Vision0.00
Ownership
ASM IP HOLDING B.V.
assignment · 539250568
Assignors
YEDNAK III, ANDREW MICHAEL
On an employer assignment, the assignors are typically the inventors.
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