Patent №
US 4,360,269
Granted
1982-11-23
Filed 1980
Owner
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
06202320
The apparatus of this invention is used for inspecting defects in a periodic pattern. The apparatus comprises a device for forming a Fourier transformed pattern of the periodic pattern and a filter for passing predetermined spatial frequency ranges of the Fourier transformed pattern. The predetermined spatial frequency ranges are lower than a spatial frequency which coincides with a first order diffraction of the Fourier transformed pattern.
AI classification
Ownership
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA
assignment · 38390008
Assignors
IWAMOTO AKITO, SEKIZAWA HIDEKAZU
On an employer assignment, the assignors are typically the inventors.