Patent №
US 4,724,322
Granted
1988-02-09
Filed 1986
Owner
APPLIED MATERIALS, INC., A CORP. OF CA.
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
06835397
A method for detecting and precisely locating features such as susceptor surfaces, wafers and surface depressions and elevations, is disclosed. A modified high angle, infrared, crossed-optics-pair sensor unit is used, as well as both perpendicular and parallel scanning.
VisionH10P 72/53
AI classification
Vision1.00
Natural language0.01
Machine learning0.00
AI hardware0.00
Planning0.00
Evolutionary computation0.00
Speech0.00
Knowledge representation0.00
Ownership
APPLIED MATERIALS, INC., A CORP. OF CA.
assignment · 46430238
Assignors
KNOWLES, JAMES L., LINDFORS, P. J. C., ADMINISTRATOR FOR JAN E. G. PANTZAR DEC'D
On an employer assignment, the assignors are typically the inventors.