SITU DIFFERENTIAL IMAGING AND METHOD UTILIZING A SCANNING ELECTRON MICROSCOPE

Patent №

US 4,845,362

Granted

1989-07-04

Filed 1988

Owner

NORTH AMERICAN PHILIPS CORPORATION

Lab

AI components

1

vision

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

07151367

The operating characteristics of an SEM apparatus are enhanced by carrying out in situ deflection during electron beam scanning of an object to be examined. Differential signals derived from the in situ deflection are a direct measure of the spatial derivative of any geometric or material variations on the surface of the scanned object.

AI classification

Vision0.74
Planning0.07
AI hardware0.02
Evolutionary computation0.02
Speech0.00
Natural language0.00
Machine learning0.00
Knowledge representation0.00

Ownership

NORTH AMERICAN PHILIPS CORPORATION

assignment · 48520636

Assignors

SICIGNANO, ALBERT, VAEZ-IRAVANI, MEHDI

On an employer assignment, the assignors are typically the inventors.

From the same owner

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