Patent №
US 4,845,362
Granted
1989-07-04
Filed 1988
Owner
NORTH AMERICAN PHILIPS CORPORATION
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
07151367
The operating characteristics of an SEM apparatus are enhanced by carrying out in situ deflection during electron beam scanning of an object to be examined. Differential signals derived from the in situ deflection are a direct measure of the spatial derivative of any geometric or material variations on the surface of the scanned object.
AI classification
Ownership
NORTH AMERICAN PHILIPS CORPORATION
assignment · 48520636
Assignors
SICIGNANO, ALBERT, VAEZ-IRAVANI, MEHDI
On an employer assignment, the assignors are typically the inventors.