METHOD AND APPARATUS FOR DRIVING A SERVO SYSTEM WHILE SUPPRESSING RESIDUAL VIBRATION GENERATED DURING POSITION CONTROL

When a move command (data indicating to move a movable unit from one position to a target position) is issued, a movable unit is displaced in response to the move command. A target trajectory which is an aggregation of target positions varying with time is determined such that a residual vibration of a structure at and after the stop of displacement of the movable unit is minimized. Target positions at various times during the displacement of the movable unit are generated based on the target trajectory. The target positions at various times are supplied to a control unit which feeds back an actual position of the movable unit and produces a drive signal which makes a difference from the target position zero. The drive signal is supplied to an actuator so that a drive force is transmitted from the actuator to the movable unit which follows a change in the target position. As a result, the movable unit is moved to the target position and the vibration at and after the stop of movement is suppressed.