Patent №
US 6,064,484
Granted
2000-05-16
Filed 1997
Owner
FUJITSU LIMITED
Lab
—
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
08814414
A pattern inspection method includes the steps of: obtaining first image data by optically picking up an actually formed pattern such as a reticle; aligning a position of the first image data with second image data of a pattern at a different layer from that of the first image data; and performing a first pattern inspection using the first and second image data. Defect inspection can be executed in a short time with a practically sufficient precision.
AI classification
Ownership
FUJITSU LIMITED
assignment · 84270551
Assignors
KOBAYASHI, KEN-ICHI, MATSUYAMA, TAKAYOSHI, MATSUI, SHOWGO
On an employer assignment, the assignors are typically the inventors.