DEFECT REVIEW SEM WITH AUTOMATICALLY SWITCHABLE DETECTOR

A method and apparatus is provided for imaging of topographic and material features of defects on the surface of a semiconductor wafer with simultaneous display of multiple SEM images generated by a single detector of backscattered and secondary electrons. A primary beam is directed at a specimen to release secondary electrons therefrom and to backscatter electrons of the particle beam therefrom, which electrons are detected by a single detector, while an imager produces and displays images responsive to the detector, and an electrode directs the path of the secondary electrons. A charge controller controls the charge placed on the electrode such that the imager produces a plurality of different images desired by the user, which are displayed substantially simultaneously by the imager. This enables inspection of a location of interest on the surface of a wafer using several images, each image possibly having different attributes, thereby facilitating comparison of images of defect sites and reference sites, identification of defects, and classification of defects.