INTEGRATED EDGE GRIPPER

Patent №

US 6,435,807

Granted

2002-08-20

Filed 2000

Owner

GENMARK AUTOMATION, INC.

Lab

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

09735535

A semiconductor processing robot is provided with a robot arm on which is mounted an integrated edge gripper having an orienting assembly and a detecting assembly. The orienting assembly operates to rotate a substrate such that a substrate reference marking, or indicium, is positioned at the detecting assembly. The detecting assembly detects the location of the reference indicium and thereby derives information about the relative orientation of the substrate in the integrated edge gripper.

PlanningH01L 21/681H10P 72/53H01L 21/68707H10P 72/7602Y10S 414/136Y10S 414/141

AI classification

Planning0.98
Natural language0.00
Evolutionary computation0.00
Machine learning0.00
AI hardware0.00
Knowledge representation0.00
Vision0.00
Speech0.00

Ownership

GENMARK AUTOMATION, INC.

assignment · 116440870

Assignors

TODOROV, ALEXANDER, GENOV, MILA

On an employer assignment, the assignors are typically the inventors.

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