ALIGNMENT OF SEMICONDUCTOR WAFERS AND OTHER ARTICLES

Patent №

US 6,935,830

Granted

2005-08-30

Filed 2001

Owner

TRU-SI TECHNOLOGIES, INC.

Lab

AI components

1

planning

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

09905218

A wafer or some other article is aligned while being held by an end-effector.

PlanningH01L 21/68H10P 72/50H01L 21/681H10P 72/53Y10S 414/136Y10S 414/141

AI classification

Planning0.98
Evolutionary computation0.39
Knowledge representation0.13
Speech0.00
Machine learning0.00
AI hardware0.00
Natural language0.00
Vision0.00

Ownership

TRU-SI TECHNOLOGIES, INC.

assignment · 121890192

Assignors

BERGER, ALEXANDER J., KRETZ, FRANK E.

On an employer assignment, the assignors are typically the inventors.

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