Patent №
US 6,460,002
Granted
2002-10-01
Filed 2000
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
09501494
In one embodiment, a method and apparatus is provided for data stackification for run-to-run control. A process run of semiconductor devices is processed. A manufacturing tag associated with the process run of semiconductor devices is recorded. Metrology data relating to the processed semiconductor devices is then acquired. The present invention calls for performing a metrology data stackification process upon the metrology data using the manufacturing tag for organizing and stacking the metrology data. The present invention provides for modifying at least one control parameter based upon the stacked metrology data.
AI classification
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 105990179
Assignors
BODE, CHRISTOPHER A., TOPRAC, ANTHONY J.
On an employer assignment, the assignors are typically the inventors.