Patent №
US 6,912,436
Granted
2005-06-28
Filed 2002
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10261156
A method and an apparatus for selectively applying correction to a process control. Manufacturing data relating to the processing of a workpiece is acquired. The manufacturing data includes metrology data relating to the processed workpiece. An adjustment for at least a first or a second control input parameter is determined based upon the manufacturing data. The first and second control input parameters are organized to isolate the first control input parameter from the second control input parameter for adjusting at least one of the first and the second control input parameters, using a controller.
AI classification
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 133510064
Assignors
JONES, GARY, BODE, CHRISTOPHER A., EDWARDS, RICHARD D., PURDY, MATTHEW A.
On an employer assignment, the assignors are typically the inventors.