METHOD AND APPARATUS FOR IMPLEMENTING CORRECTED SPECIES BY MONITORING SPECIFIC STATE PARAMETERS

The present invention provides for a method and an apparatus for implementing corrected species by monitoring state parameters in a manufacturing process. A process run of semiconductor devices is performed. Production data relating to the process run of semiconductor devices is acquired. The acquired production data is stored into a production database. A recipe management analysis is performed. The apparatus of the present invention comprises: a recipe management system; a first machine interface connected to said recipe management system; a processing tool connected to said first machine interface; and a fault detection system connected to said first machine interface.