Patent №
US 6,484,306
Granted
2002-11-19
Filed 1999
Owner
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
+1 more
AI components
1
vision
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
09466730
A method for performing scanned defect inspection of a collection of contiguous areas using a specified false-alarm-rate and capture-rate within an inspection system that has characteristic seek times between inspection locations. The multi-stage method involves setting an increased false-alarm-rate for a first stage of scanning, wherein subsequent stages of scanning inspect only the detected areas of probable defects at lowered values for the false-alarm-rate. For scanning inspection operations wherein the seek time and area uncertainty is favorable, the method can substantially increase inspection throughput.
AI classification
Ownership
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
assignment · 106260562
EUV LLC
assignment · 146010343
Assignors
JEONG, SEONGTAE, BOKOR, JEFFREY
On an employer assignment, the assignors are typically the inventors.