SYSTEM AND METHOD FOR FINDING AN OPERATION/TOOL COMBINATION THAT CAUSES INTEGRATED FAILURE IN A SEMICONDUCTOR FABRICATION FACILITY

A system and method for finding operation/tool's combination which causes the integration failure in a semiconductor fabrication facility is disclosed. It comprises the steps of generating a candidate operation/tool list by selecting the operation/tool's that are more likely to cause said failure. Assign a weight value to each lot in the lot list for each operatioon/tool in said candidate operation/tool list, the weight value being a predetermined positive value for a bad lot, and a negative value for a good lot. Then select any pair of operation/tool's from said candidate operation/tool list and calculate a peak combination cumulative value for that pair of operation/tool's. Rank each pair of operation/tool's according to their corresponding peak combination cumulative values. It is determined the pair of operation/tool's with the greatest peak combination cumulative value the most likely to cause said failure.