Patent №
US 7,657,339
Granted
2010-02-02
Filed 2005
Owner
ADVANCED MICRO DEVICES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11251604
A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correlated with the metrology data. A process control associated with a plurality of processes to be performed on a second workpiece is adjusted based upon the correlating.
AI classification
Ownership
ADVANCED MICRO DEVICES, INC.
assignment · 171130278
Assignors
RETERSDORF, MICHAEL A.
On an employer assignment, the assignors are typically the inventors.