Patent №
US 6,957,154
Granted
2005-10-18
Filed 2003
Owner
QCEPT TECHNOLOGIES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10631469
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
AI classification
Planning0.99
Vision0.49
Machine learning0.10
AI hardware0.01
Natural language0.01
Knowledge representation0.00
Speech0.00
Evolutionary computation0.00
Ownership
QCEPT TECHNOLOGIES, INC.
assignment · 148190575
Assignors
STEELE, M. BRANDON, HAWTHORNE, JEFFREY ALAN
On an employer assignment, the assignors are typically the inventors.
From the same owner
PATTERNED WAFER INSPECTION SYSTEM USING A NON-VIBRATING CONTACT POTENTIAL DIFFERENCE SENSORUS 8,275,564 · 2012DEFECT CLASSIFICATION UTILIZING DATA FROM A NON-VIBRATING CONTACT POTENTIAL DIFFERENCE SENSORUS 7,900,526 · 2011WAFER INSPECTION SYSTEMUS 7,308,367 · 2007INSPECTION SYSTEM AND APPARATUSUS 7,103,482 · 2006