Patent №
US 7,103,482
Granted
2006-09-05
Filed 2004
Owner
QCEPT TECHNOLOGIES, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10710836
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
AI classification
Ownership
QCEPT TECHNOLOGIES, INC.
assignment · 153900539
Assignors
STEELE, M. BRANDON, HAWTHORNE, JEFFREY ALAN, KIM, CHUNHO, SOWELL, DAVID C.
On an employer assignment, the assignors are typically the inventors.