METHOD FOR AUTOMATIC MASK TOOL TRANSLATION

Patent №

US 6,964,030

Granted

2005-11-08

Filed 2003

Owner

TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.

Lab

AI components

2

planning · hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

10404484

A method for translating mask tooling information comprises the steps of: receiving a plurality of input mask tooling forms for fabricating a wafer, at least two of the plurality of input masking tool forms having respectively different sequences of layers; forming a template having a sequence of layers formed by the union of the different sequences of layers; and translating information from each of the input mask tooling forms to fit the template.

AI classification

Planning0.87
AI hardware0.75
Natural language0.05
Vision0.02
Machine learning0.01
Knowledge representation0.00
Speech0.00
Evolutionary computation0.00

Ownership

TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.

assignment · 139350100

Assignors

HONG, HSIN-MING, TSAO, PIO-CHUO, FENG, SHU-LING, TSENG, YI-HONG

On an employer assignment, the assignors are typically the inventors.

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