INTELLIGENT MODELLING OF PROCESS AND TOOL HEALTH

Patent №

US 7,020,569

Granted

2006-03-28

Filed 2004

Owner

IBEX PROCESS TECHNOLOGY INC.

Lab

AI components

4

ml · planning · evo · hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

10801064

The health of a tool is predicted based on temporally ordered input data representing parameters indicative of tool health. A sliding time window is used to partition input data into temporally displaced data sets. Non-linear regression models determine, based on the data sets, a set of predictive values relating to tool health at a future time. A tool-health metric is then determined based on one or more of the predictive values.

AI classification

Machine learning1.00
Planning1.00
AI hardware1.00
Evolutionary computation0.96
Natural language0.09
Knowledge representation0.07
Vision0.00
Speech0.00

Ownership

IBEX PROCESS TECHNOLOGY INC.

assignment · 153050116

Assignors

CARD, JILL P., CHAN, WAI T., CAO, AN

On an employer assignment, the assignors are typically the inventors.

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