Patent №
US 7,196,350
Granted
2007-03-27
Filed 2005
Owner
APPLIED MATERIALS, INC.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11128133
A method and apparatus for testing and characterizing features formed on a substrate. In one embodiment, a test structure is provided that includes a test element having a first side and an opposing second side. A first set of one or more structures defining a first region having a first local density are disposed adjacent the first side of the test element. A second set of one or more structures defining a second region having a second local density are disposed adjacent the second side of the test element. A third set of one or more structures defining a third region having a first global density are disposed adjacent the first region. A fourth set of one or more structures defining a fourth region having a second global density are disposed adjacent the second region.
AI classification
Ownership
APPLIED MATERIALS, INC.
assignment · 162000322
Assignors
SMAYLING, MICHAEL C., YANG, SUXIE XIURU, DUANE, MICHAEL P.
On an employer assignment, the assignors are typically the inventors.