Patent №
US 7,206,653
Granted
2007-04-17
Filed 2005
Owner
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Lab
—
AI components
1
planning
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11288489
Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.
PlanningG06Q 10/06
AI classification
Planning1.00
Evolutionary computation0.18
Machine learning0.10
AI hardware0.03
Knowledge representation0.03
Natural language0.00
Speech0.00
Vision0.00
Ownership
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
assignment · 172920508
Assignors
OU, MING-FENG, FANG, GWO-CHIANG, CHANG, CHAO-FAN, CHEN, JU-KAU, WU, OLIVER
On an employer assignment, the assignors are typically the inventors.
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