ALIGNING METHOD, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Patent №
US 7,212,286
Granted
2007-05-01
Filed 2002
Owner
CANON KABUSHIKI KAISHA
Lab
—
AI components
1
evo
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
10178234
A method of selecting alignment marks, to be detected, from a plurality of alignment marks formed on a substrate includes the step of calculating a deviation between a distance of a designed position of an alignment mark from a reference position and a reference value, with respect to each of the plurality of alignment marks. The alignment marks, to be detected, are selected based on the deviations.
Evolutionary computationG03F 9/7046
AI classification
Evolutionary computation0.97
Knowledge representation0.01
Natural language0.00
Vision0.00
Planning0.00
Speech0.00
Machine learning0.00
AI hardware0.00
Ownership
CANON KABUSHIKI KAISHA
assignment · 130490353
Assignors
HOSHI, TAI
On an employer assignment, the assignors are typically the inventors.
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