Patent №
US 7,258,012
Granted
2007-08-21
Filed 2006
Owner
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
Lab
—
AI components
1
hardware
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11363293
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.
AI hardwareH03H 9/02338B81B 3/0062B81C 1/00246G01P 15/0802G01P 15/125G01P 15/18B81B 2201/0235B81C 2203/0728+1 more
AI classification
AI hardware0.71
Natural language0.00
Machine learning0.00
Vision0.00
Evolutionary computation0.00
Speech0.00
Knowledge representation0.00
Planning0.00
Ownership
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
assignment · 193680533
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