SELF TEST OF MEMS ACCELEROMETER WITH ASICS INTEGRATED CAPACITORS

An apparatus comprises a micro-electromechanical system (MEMS) sensor including a first capacitive element and a second capacitive element and an integrated circuit (IC). The IC includes a switch network circuit and a capacitance measurement circuit. The switch network circuit is configured to electrically decouple the first capacitive element of the MEMS sensor from a first input of the IC and electrically couple the second capacitive element to a second input of the IC. The capacitance measurement circuit can be configured to measure capacitance of the second capacitive element of the MEMS sensor during application of a first electrical signal to the decoupled first capacitive element.