Patent №
US 7,536,670
Granted
2009-05-19
Filed 2005
Owner
INVARIUM, INC.
+1 more
Lab
—
AI components
2
vision · evo
Assignment
Recorded
Dataset
AIPD
2023_r1 edition
Application
11141805
A test mask with both verification structures and calibration structures is provided to enable the formation of an image of at least one verification structure and at least one calibration structure at a plurality of different test site locations under different dose and defocus conditions to allow the calibration structures to be measured and to obtain at least one computational model for optical proximity correction purposes.
AI classification
Ownership
INVARIUM, INC.
assignment · 170100689
CADENCE DESIGN SYSTEMS, INC.
assignment · 211220977
Assignors
PERCIN, GOKHAN, RAMANUJAM, RAM, ZACH, FRANZ XAVER
On an employer assignment, the assignors are typically the inventors.