AUTOMATED SPUTTERING TARGET PRODUCTION

Patent №

US 7,561,937

Granted

2009-07-14

Filed 2007

Owner

TOSOH SMD ETNA, LLC

+4 more

Lab

AI components

2

planning · hardware

Assignment

Recorded

Dataset

AIPD

2023_r1 edition

Application

11795395

A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a respective one of a plurality of metal target blanks to one or more comparable values of at least one desired criterion; selecting one of the metal target blanks from a plurality of metal target blanks as a work-in-progress; assigning a serial route for the work-in-progress; processing the work-in-progress by translating the work-in-progress from note to node with an automated transport, after completion of the events at each node; rejecting or accepting the work-in-progress as a metal target by evaluating a result of at least one event of the one or more respective events to be completed at, at least one of the plurality of nodes.

PlanningAI hardwareG05B 19/418C23C 14/3414G05B 2219/31316G05B 2219/32114G05B 2219/32244G05B 2219/32256G05B 2219/32283G05B 2219/32304+5 more

AI classification

Planning0.99
AI hardware0.82
Evolutionary computation0.05
Knowledge representation0.00
Natural language0.00
Vision0.00
Machine learning0.00
Speech0.00

Ownership

TOSOH SMD ETNA, LLC

assignment · 218470757

CABOT CORPORATION

assignment · 218480119

ADVANCED AUTOMATION

assignment · 218520160

INDUSTRIAL TECHNOLOGIES, INC.

assignment · 218650615

TOSOH SMD, INC.

assignment · 225150671

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